Bibliografische Daten
ISBN/EAN: 9781461486596
Sprache: Englisch
Umfang: viii, 64 S., 13 s/w Illustr., 16 farbige Illustr.,
Einband: kartoniertes Buch
Beschreibung
InhaltsangabeChapter 1: Introduction to Helium Ion Microscopy Chapter 2: Microscopy with Ions - A brief history Chapter 3: Operating the Helium Ion Microscope Chapter 4: Ion -Solid Interactions and Image Formation Chapter 5: Charging and Damage Chapter 6: Microanalysis with the HIM Chapter 7: Ion Generated Damage Chapter 8: Working with other Ion beams Chapter 9: Patterning and Nanofabrication Conclusion Bibliography Appendix: iSE Yields, and IONiSE parameters for He+ excitation of Elements and Compounds Index
Produktsicherheitsverordnung
Hersteller:
Springer Verlag GmbH
juergen.hartmann@springer.com
Tiergartenstr. 17
DE 69121 Heidelberg
